Spiral inductor formed in a semiconductor substrate

Details Spiral inductor formed in a semiconductor substrate Spiral inductor formed in a semiconductor substrate

2006-07-11

2006-07-11

Smith, Zandra V. (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

C257S379000, C257S904000

Reexamination Certificate

active

07075167

ABSTRACT:
An inductor formed on a semiconductor substrate, comprising active device regions. The inductor comprises conductive lines formed on a dielectric layer overlying the semiconductor substrate. The conductive lines are patterned and etched into the desired shape, in one embodiment a planar spiral. A region of the substrate below the inductor are removed to lower the inductive Q factor.

REFERENCES:
patent: 5227659 (1993-07-01), Hubbard
patent: 5446311 (1995-08-01), Ewen et al.
patent: 5736749 (1998-04-01), Xie
patent: 5788854 (1998-08-01), Desaigoudar et al.
patent: 6057202 (2000-05-01), Chen et al.
patent: 6083802 (2000-07-01), Wen et al.
patent: 6140197 (2000-10-01), Chu et al.
patent: 6153489 (2000-11-01), Park et al.
patent: 6160303 (2000-12-01), Fattaruso
patent: 6211056 (2001-04-01), Begley et al.
patent: 6249191 (2001-06-01), Forbes
patent: 6420773 (2002-07-01), Liou
patent: 6429504 (2002-08-01), Beaussart et al.
patent: 6503838 (2003-01-01), Swanson
patent: 6534843 (2003-03-01), Acosta et al.
patent: 1 143 517 (2001-10-01), None
patent: 11-354330 (1999-12-01), None

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