Spiral inductor

Details Spiral inductor Spiral inductor

2007-10-28

2009-02-03

Mai, Anh T (Department: 2832)

Inductor devices

Coil or coil turn supports or spacers

Printed circuit-type coil

C336S223000, C336S232000

Reexamination Certificate

active

07486168

ABSTRACT:
The present invention relates to a spiral inductor for use in a semiconductor device. The spiral inductor comprises a dielectric layer formed of a plurality of layers stacked on a semiconductor substrate, and a plurality of curved metal lines formed in the dielectric layers which are serially connected in order to form a circular spiral shape.

REFERENCES:
patent: 5831331 (1998-11-01), Lee
patent: 6075427 (2000-06-01), Tai et al.
patent: 6480086 (2002-11-01), Kluge et al.
patent: 6489647 (2002-12-01), Lin
patent: 7071806 (2006-07-01), Masu et al.
patent: 7082580 (2006-07-01), Zarkesh-Ha et al.

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