Spinning piezoelectric beam of a dual-axis angular rate sensor a

Details Spinning piezoelectric beam of a dual-axis angular rate sensor a Spinning piezoelectric beam of a dual-axis angular rate sensor a

1990-05-25

1991-09-03

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310330, 310331, 310332, 310312, 73 1D, 73 1DV, H01L 4108

Patent

active

050457454

ABSTRACT:
A method for adjusting a piezoelectric beam of a dual-axis angular rate sensor, in which the piezoelectric beam is excited in a direction at right angles to the lengthwise direction of two piezoelectric sensors and to a rotary shaft; detected voltages of the two piezoelectric sensors are measured by a signal measuring circuit; a bending portion of at least one of the two piezoelectric sensors is ground so that the levels of the two measured signals and the difference therebetween become small; the piezoelectric beam is excited again in the lengthwise direction of the piezoelectric sensors at right angles to the rotary shaft; detected voltages of the two piezoelectric sensors are measured by the signal measuring circuit; and a weight mounted on the free end of at least one of the two piezoelectric sensors is ground so that the levels of the two measured signals and the difference therebetween become small. Thus, acceleration components applied to the piezoelectric beam, in the detected voltages of the two piezoelectric sensors, have the same phase and the same amplitude. On both sides of each piezoelectric sensor there are formed electrodes which are spaced 1.5 times the thickness of the sensor from support washers.

REFERENCES:
patent: 3304787 (1967-02-01), Chiku et al.
patent: 3659255 (1972-04-01), Trott
patent: 4407094 (1983-10-01), Bennett et al.
patent: 4431935 (1984-02-01), Rider
patent: 4445361 (1984-05-01), Moffet et al.
patent: 4495812 (1985-01-01), Gorris
patent: 4791815 (1988-12-01), Yamaguchi et al.

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