Drying and gas or vapor contact with solids – Apparatus – With apparatus using centrifugal force
Patent
1993-04-16
1994-08-23
Bennet, Henry A.
Drying and gas or vapor contact with solids
Apparatus
With apparatus using centrifugal force
34242, 34184, F26B 1724
Patent
active
053395395
ABSTRACT:
A spindrier according to the present invention includes a box body enclosing a plurality of wafers, a rotor for holding the wafers in the box body and rotated by a motor, and upper and lower clamp bars for holding the wafers face to face with their faces directed perpendicular to rotating shafts of the rotor. The lower clamp bars are connected and fixed to the rotating shafts so as to hold lower rim portions of the wafers thereon when the wafers are set in the rotor. The upper clamp bars are connected to one of the rotating shafts at their base ends so that they can be swung vertically erect and also and horizontally relative to the rotating shaft and they are locked to the other rotating shaft at their front ends when they are swung horizontally. They include a mechanism for swinging them, a locking mechanism for locking their front ends to the other rotating shaft, and an unlocking mechanism for releasing their front ends from the other rotating shaft.
REFERENCES:
patent: 4571850 (1986-02-01), Hunt et al.
Honda Yoshiyuki
Shiraishi Hirofumi
Bennet Henry A.
Tokyo Electron Limited
Tokyo Electron Saga Limited
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