Spindle assembly with improved wafer holder

Details Spindle assembly with improved wafer holder Spindle assembly with improved wafer holder

1994-07-01

1996-10-22

Lopez, F. Daniel

Drying and gas or vapor contact with solids

Apparatus

With apparatus using centrifugal force

198379, 294106, 414783, 414936, F26B 508

Patent

active

055664660

ABSTRACT:
A wafer holder which grips a wafer by its edges is disclosed. The wafer holder is mounted on a spindle assembly which spins the wafer so held, for example, to spin dry both the front and back side of the wafer. The wafer holder includes two pairs of wafer holding bumpers, each pair coupled to one end of a reciprocating arm which swings each pair inward and outward to define an open position for releasing or loading a wafer, and a closed position for holding the wafer. Each arm is coupled to an insert and thrust bearing allowing for rotation to provide the reciprocating motion. After the insert and thrust bearing have toggled past a predefined position while the wafer holder is in the closed position, further motion is prevented, to lock the wafer holder in the closed position. Further, the insert member rotates back and forth in response to up and down movement of a rod within the spindle to allow for opening and closing of the wafer holder.

REFERENCES:
patent: 4313266 (1982-02-01), Tam
patent: 4651440 (1987-03-01), Karl
Higginson et al, Disc Support for Spin Drying, IBM Technical Disclosure Bulletin, V 18, No. 6, Nov. 1975.

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