Stock material or miscellaneous articles – Composite – Of fluorinated addition polymer from unsaturated monomers
Reexamination Certificate
2008-01-08
2008-01-08
Jackson, Monique R. (Department: 1773)
Stock material or miscellaneous articles
Composite
Of fluorinated addition polymer from unsaturated monomers
C428S422000, C428S426000, C428S429000, C428S447000, C428S457000, C428S522000
Reexamination Certificate
active
07316844
ABSTRACT:
New protective coating layers for use in wet etch processes during the production of semiconductor and MEMS devices are provided. The layers include a primer layer, a first protective layer, and an optional second protective layer. The primer layer preferably comprises an organo silane compound in a solvent system. The first protective layer includes thermoplastic copolymers prepared from styrene, acrylonitrile, and optionally other addition-polymerizable monomers such as (meth)acrylate monomers, vinylbenzyl chloride, and diesters of maleic acid or fumaric acid. The second protective layer comprises a highly halogenated polymer such as a chlorinated polymer which may or may not be crosslinked upon heating.
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Flaim Tony D.
Li Chenghong
Ruben Kimberly A.
Brewer Science Inc.
Hovey & Williams, LLP
Jackson Monique R.
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