Spin-on method and apparatus for applying coating material to a

Details Spin-on method and apparatus for applying coating material to a Spin-on method and apparatus for applying coating material to a

1991-11-15

1993-08-24

Beck, Shrive

Coating processes

Centrifugal force utilized

427348, 118 52, 118320, B05D 312

Patent

active

052387135

ABSTRACT:
A coating apparatus comprises a spinning chuck rotatably supported within an enclosure and securely holding a substrate thereon. A coating material is applied onto the surface of the substrate and distributed over the substrate by centrifugal forces. An annular air duct is disposed in surrounding and spaced relation to the spinning chuck, and a disk is placed between the air duct and the spinning chuck and has a plurality of guide vanes. Fans are provided in the air duct to develop a positive flow of air over the substrate. The flow of air is guided by the guide vanes in a direction identical to the direction of rotation of the substrate so as to eliminate undesirable deposition from the end edges of the substrate.

REFERENCES:
patent: 4068019 (1978-01-01), Boecki
patent: 4374873 (1983-02-01), Piedboeuf et al.
patent: 4393807 (1983-07-01), Fujimura et al.
patent: 4510176 (1985-04-01), Cuthbert et al.
patent: 4528934 (1985-07-01), Nakayama

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