Spin head and substrate treating method using the same

Details Spin head and substrate treating method using the same Spin head and substrate treating method using the same

2011-01-11

2011-01-11

Gravini, Stephen M. (Department: 3743)

Drying and gas or vapor contact with solids

Process

With nondrying treating of material

C034S078000, C034S080000, C414S217000, C118S313000, C134S200000

Reexamination Certificate

active

07866058

ABSTRACT:
A spin head includes a rotatable plate, first chucking pins and second chucking pins for supporting a edge portion of a substrate loaded on the plate, and a driving unit for selectively driving the first and second chucking pins. The driving unit includes a first magnet connected to the first chucking pin and disposed at a first height, a second magnet connected to the second chucking pin and disposed at a second height, and a driving magnet for driving the first and second magnets. The driving magnet is elevated by means of an elevating member to selectively apply a magnetic force to the first or second magnet and moves in the radius outside direction of the first or second chucking pin due to a magnetic force.

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