Spin drier for semiconductor materials

Details Spin drier for semiconductor materials Spin drier for semiconductor materials

1988-05-11

1989-07-18

Bennett, Henry A.

Drying and gas or vapor contact with solids

Apparatus

With apparatus using centrifugal force

34184, F26B 1730

Patent

active

048480061

ABSTRACT:
A spin drier comprising a rotating rotor for spin-drying semiconductor materials, in which the rotor is made of aluminum to lessen the weight of the rotor and has therein reinforcing rods fastened between the upper ring and the base plate of the rotor in order to bring higher strength of the rotor. Such arrangements enable a highly accelerated starting in rotation of the rotor. Due to such highly accelerated starting, the spin drier can remove water droplets stuck on wafers completely so as to obviate occurrence of water marks.

REFERENCES:
patent: 4777732 (1988-10-01), Hirano

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