Spin drier for semiconductor materials

Details Spin drier for semiconductor materials Spin drier for semiconductor materials

1988-06-16

1990-03-13

Bennet, Henry A.

Drying and gas or vapor contact with solids

Apparatus

With apparatus using centrifugal force

34184, F26B 1730

Patent

active

049073494

ABSTRACT:
A spin drier is disclosed, which comprises a casing and a rotor to be rotated in the casing for spin-drying semiconductor materials. The rotor includes a plurality of predetermined areas in which a carrier housing the materials to be dried is set with a cradle. There are provided at each of the areas in the rotor at least one pair of opposed holder rods with their free ends adjacent to each other and vertical stopper rods relevant to the holder rods. Each holder rod is reinforced by the stopper rod and receives in the vicinity of its free end a leg portion of the carrier in which semiconductor materials are housed. Also, each holder rod in the vicinity of other secured end thereof is adapted to be engaged with a portion of the cradle, to thereby hold securely both the carrier and the cradle.

REFERENCES:
patent: 4525938 (1985-07-01), Aigo
patent: 4677759 (1987-07-01), Inamura
patent: 4777732 (1988-10-01), Hirano

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