Spin drier for semiconductor material

Details Spin drier for semiconductor material Spin drier for semiconductor material

1985-10-04

1987-07-07

Schwartz, Larry I.

Drying and gas or vapor contact with solids

Apparatus

With apparatus using centrifugal force

279 1C, 279 33, F26B 1118

Patent

active

046777580

ABSTRACT:
Disclosed herein is a spin drier for semiconductor material including a vertical shaft, a table located on the top of the shaft, support members for supporting thereon a semiconductor material, holding members for holding the outer periphery of the supported semiconductor material, and three or more chuck members, each said chuck member having a pin passing through the table, a chuck part mounted on the top of the pin, a weight eccentrically attached to the pin and a spring member for restoring the chuck part to a determined non-chuck position, whereby in rotation the weight is shifted to a radially outer position due to centrifugal force to thereby move the chuck part radially inwardly to hold upper surface portions of the outer periphery of the supported semiconductor material.

REFERENCES:
patent: 4313266 (1982-02-01), Tam

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