Spin coating process

Details Spin coating process Spin coating process

1977-04-08

1978-09-12

Smith, Ronald H.

Gas separation: apparatus

Electric field separation apparatus

Including gas flow distribution means

96 351, 96 86P, 427240, 427273, 427331, 427335, 427336, 427337, B05D 312

Patent

active

041134923

ABSTRACT:
A process of spin coating a coating composition on the surface of a base plate, comprising supplying a material which is compatable with the coating composition, in either a liquid or vapor form, to the opposite surface of the base plate to the surface on which the coating composition has been supplied (hereinafter "back surface" or "back side") while rotating the base plate to remove the coating composition flowing to the back surface or to the edge portion of the plate. The material compatible with the coating composition may be applied to the surface of the base plate at the periphery thereof to reduce or remove the coating composition there.

REFERENCES:
patent: 10789 (1854-04-01), Field
patent: 1744463 (1930-01-01), Gravel
patent: 2110282 (1938-03-01), Amsel
patent: 2563417 (1947-04-01), Pessel
patent: 2987415 (1961-06-01), Taggett
patent: 3936301 (1976-02-01), Schneider

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