Spin coating process

Details Spin coating process Spin coating process

1998-10-30

2000-12-12

Beck, Shrive

Coating processes

Centrifugal force utilized

427425, 118 52, 118320, B05D 312

Patent

active

061595411

ABSTRACT:
A coating process comprises the steps of (a) holding a substrate using a spin chuck surrounded by inner and outer cups, such that the substrate can rotate, (b) rotating the substrate by rotating the spin chuck, and applying a coating liquid onto the substrate, thereby forming a coating on the substrate, (c) discharging, from the inner and outer cups, that part of the coating liquid which is scattered from the substrate while the substrate is rotated, (d) exhausting the inner and outer cups through a plurality of exhaust ports formed in outer peripheral portions of the outer cup, and (e) reducing, from a peripheral region of the substrate, the mist of the coating liquid which has occurred during the step (b), before the substrate stops rotation.

REFERENCES:
patent: 5688322 (1997-11-01), Motoda et al.
patent: 5718763 (1998-02-01), Tateyama et al.
patent: 5762709 (1998-06-01), Sugimoto et al.
patent: 5908657 (1999-06-01), Kimura et al.
patent: 5962193 (1999-10-01), Lin et al.

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