Spin coating method and device

Details Spin coating method and device Spin coating method and device

1987-08-21

1989-04-18

Bell, Janyce

Coating processes

Centrifugal force utilized

118 52, 437231, B05D 312, B05C 1300

Patent

active

048226394

ABSTRACT:
In coating a substrate such as a glass plate with a photo-sensitive coating solution by spin coating, the substrate is tilted so that the coating solution flows down the substrate to cover the entire surface of the latter, and then the substrate is held horizontal, and rotated so that a layer of coating solution uniform in thickness is formed on the substrate.

REFERENCES:
patent: 3672932 (1972-06-01), D'Augustine
patent: 4124411 (1978-11-01), Meuleman et al.
patent: 4468410 (1984-08-01), Zeya

Affiliated with

Also associated with

Rating

Spin coating method and device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Spin coating method and device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Spin coating method and device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2396234