Spin coating method and apparatus for liquid carbon dioxide syst

Details Spin coating method and apparatus for liquid carbon dioxide syst Spin coating method and apparatus for liquid carbon dioxide syst

1997-12-16

1999-12-14

Bell, Janyce

Coating processes

Centrifugal force utilized

4273855, 427162, B05D 312

Patent

active

060014180

ABSTRACT:
A spin coating method comprises applying a carbon dioxide liquid to surface portion of a substrate; and then rotating the substrate about an axis to distribute the carbon dioxide liquid on the substrate. The carbon dioxide liquid can be distributed on the substrate as a carrier, for the purpose of depositing a material such as a coating on the substrate. In addition, the carbon dioxide liquid can be distributed on the substrate as a solvent, for the purpose of solubilizing, dissolving or removing a material previously deposited on the surface of the substrate. Apparatus for carrying out the present invention is also disclosed.

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Ober et al.; Imaging Polymers with Supercritical Carbon Dioxide, Adv. Materials, 9(13):1039-1043 (1997). (no mo.).

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