Spin coating dispense arm assembly

Details Spin coating dispense arm assembly Spin coating dispense arm assembly

1996-06-21

1998-12-15

Edwards, Laura

Coating apparatus

With means to apply electrical and/or radiant energy to work...

With electromagnetic and/or electrostatic removal of...

118302, 118 52, B05B 1304, B05B 716

Patent

active

058490841

ABSTRACT:
An apparatus is disclosed for dispensing liquids on to a rotating surface. The apparatus includes first and second dispense lines connected to at least one liquid source to permit the dispensing of liquids from the first and second dispense lines on to a rotating surface. In a preferred embodiment, the first and second dispense lines are tubular and have first and second dispense tube disposed within the interior region of the first and second dispense lines, respectively. The first and second dispense tubes define first and second annular regions with the dispense lines, which are preferably connected by a fluid channel. A heat exchanger is attached to the first and second annular region to enable a heat transfer medium to be circulated through the first and second annular regions and the fluid channel. Also in a preferred embodiment, a solvent dispense line is disposed between the first and second dispense lines and a vapor solvent bath is provided containing a purge section including a cleaning member to allow excess coating liquid to be rinsed from the first and second dispense lines.

REFERENCES:
patent: 4886012 (1989-12-01), Ikeno et al.
patent: 5002008 (1991-03-01), Ushijima et al.
patent: 5020200 (1991-06-01), Mimasaka et al.
patent: 5289222 (1994-02-01), Hurtig
patent: 5312487 (1994-05-01), Akimoto et al.
patent: 5358740 (1994-10-01), Bornside et al.
patent: 5405813 (1995-04-01), Rodrigues
patent: 5427820 (1995-06-01), Biche et al.
patent: 5429912 (1995-07-01), Neoh

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