Coating apparatus – Projection or spray type – Rotating work
Patent
1995-03-16
1997-01-07
Warden, Jill
Coating apparatus
Projection or spray type
Rotating work
118 52, 118501, 118326, B05B 1300
Patent
active
055912648
ABSTRACT:
A spin coating device for a substrate, in which a uniform thin film can be formed by applying an application liquid to a substrate and the quality of the substrate can be further improved. The spin coating device for a substrate comprises a turntable 2 for holding and rotating a substrate 1; an application liquid supply means 4 for supplying an application liquid 3 to the rotating substrate 1: splash preventing means 20, which are arranged at the periphery of the substrate 1 held by the turntable 2, prevent the droplets of the application liquid from splashing and provide with an opening portion 10 for circulating the flow A of external air in an area ranging from the central portion toward the peripheral portion of the substrate 1 held by the turntable 2. Exhaust means 8 and 9 for exhausting air from within the splash preventing means 20 are provided.
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Ito Yoshinori
Sugimoto Emi
Yoshio Akira
Carrillo Sharidan
Kananen Ronald P.
Sony Corporation
Warden Jill
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