Spin-coating device

Details Spin-coating device Spin-coating device

1996-12-12

1998-06-16

Edwards, Laura

Coating apparatus

Projection or spray type

Rotating turret work support

118 52, 134153, B05B 1302, B05B 300

Patent

active

057663548

ABSTRACT:
A spin-coating device comprises; a turntable for concentrically supporting a substrate; a spindle motor for rotating the turntable about a central axis thereof and connected via a rotating shaft thereto; a supply mechanism for feeding and dripping a fluid coating material onto the substrate; and a holding mechanism for maintaining that the central axis of rotation of the turntable carrying the substrate is placed to be inclined at a predetermined angle with respect to a gravitational direction while the fluid coating material is dripped onto the rotating substrate.

REFERENCES:
patent: 4822639 (1989-04-01), Fujii et al.
patent: 5095848 (1992-03-01), Ikeno

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