Coating processes – Centrifugal force utilized
Patent
1993-02-03
1995-03-07
Bell, Janyce
Coating processes
Centrifugal force utilized
118 50, 118 52, 427294, 427377, 427378, 4273855, B05D 312
Patent
active
053956494
ABSTRACT:
A method and apparatus for rotating a substrate having a liquid material placed thereon to coat the liquid material over the substrate. A plate member is positioned at a predetermined height above the substrate to minimize the growth of the fluid flows produced above the substrate due to rotation of the substrate.
REFERENCES:
patent: 2580131 (1951-12-01), Rowell
patent: 4347302 (1982-08-01), Gotman
patent: 4393807 (1983-07-01), Fujimura et al.
patent: 4790262 (1988-12-01), Nakayama et al.
patent: 4889069 (1989-12-01), Kawakami
I.B.M. Technical Disclosure Bulletin, vol. 22, No. 5, Oct. 1979.
I.B.M. Technical Disclosure Bulletin, vol. 17, No. 11, Apr. 1975.
Bell Janyce
Sony Corporation
LandOfFree
Spin coating apparatus for film formation over substrate does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Spin coating apparatus for film formation over substrate, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Spin coating apparatus for film formation over substrate will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1404823