Spin coating apparatus

Details Spin coating apparatus Spin coating apparatus

1988-06-27

1989-12-12

Hoag, Willard

Coating apparatus

Control means responsive to a randomly occurring sensed...

Temperature responsive

118 52, 118302, 118320, B05C 102

Patent

active

048860123

ABSTRACT:
A spin coating apparatus has a refrigerated container which maintains a coating liquid that contains thermosetting materials or thermal crosslinking agents at a temperature which is sufficiently below the temperature of a substrate on which it is to be coated such that the coating liquid will not set. A heat exchanger heats the coating liquid from the reduced temperature of the refrigerated container to the temperature of the substrate just before the coating liquid is applied to the substrate.

REFERENCES:
patent: 3356130 (1967-12-01), Mellen et al.
patent: 3387992 (1968-06-01), Arthur et al.
patent: 3945535 (1976-03-01), Leiste et al.
patent: 4113492 (1978-09-01), Sato et al.
patent: 4416213 (1983-11-01), Sakiya
patent: 4451507 (1984-05-01), Beltz et al.
patent: 4510176 (1985-04-01), Cuthbert et al.
patent: 4564280 (1986-01-01), Fukuda
patent: 4646784 (1987-03-01), Leeuwe
patent: 4688918 (1987-08-01), Suzuki et al.
patent: 4712994 (1987-12-01), Fierkens et al.

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