Spin coating apparatus

Details Spin coating apparatus Spin coating apparatus

1998-10-07

2000-12-26

Edwards, Laura

Coating apparatus

Work holders, or handling devices

118 52, 118320, 118501, 134153, 134902, 137 8, 396611, 396627, 427240, B05C 1302, B05D 302, B08B 308, B03D 504

Patent

active

061652679

ABSTRACT:
A spin coating apparatus requires less cleanroom air flow than prior spin coating apparatus to minimize cleanroom contamination. A shaped exhaust duct from the spin coater maintains process quality while requiring reduced cleanroom air flow. The exhaust duct can decrease in cross section as it extends from the wafer, minimizing eddy formation. The exhaust duct can conform to entrainment streamlines to minimize eddy formation and reduce interprocess contamination at minimal cleanroom air flow rates.

REFERENCES:
patent: 5289222 (1994-02-01), Hurtig
patent: 5366757 (1994-11-01), Lin
patent: 5378511 (1995-01-01), Cordinali et al.
patent: 5449405 (1995-09-01), Cordinali et al.
patent: 5562772 (1996-10-01), Neoh

Affiliated with

Also associated with

Rating

Spin coating apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Spin coating apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Spin coating apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-990464