Spin coating apparatus

Details Spin coating apparatus Spin coating apparatus

1990-05-16

1992-08-04

Jones, W. Gary

Coating apparatus

Control means responsive to a randomly occurring sensed...

Responsive to condition of coating material

118696, 118697, 118712, 118 52, 118320, 222571, 222 52, 222 63, 222 71, 222148, 222334, 2221461, 417 63, 417395, 239 71, 73 40, 73 405R, B05C 500, B05C 1102, B05C 1110

Patent

active

051349620

ABSTRACT:
The present invention relates to a spin coating apparatus for feeding a clean liquid at a fixed rate. In any of the feeding apparatus in the prior art, no constituent other than a filter has the function of eliminating foreign matter, and the operation of feeding a liquid under precise control is not attained. This results in the problem of the mixing of the foreign matter (and air bubbles) in the feed liquid, and the problem of nonuniformity in a feed speed as well as a feed amount. As expedients for solving these problems, the present invention provides the functions of automatically sensing and excluding factors for the appearances of the foreign matters, and devices for automatically and precisely controlling feed control elements such as a pump, thereby feeding the clean liquid in a constant amount and at a constant speed.

REFERENCES:
patent: 3105442 (1963-10-01), Howerton
patent: 3176623 (1965-04-01), Howerton et al.
patent: 3227314 (1966-01-01), Porter et al.
patent: 3887110 (1975-06-01), Porter
patent: 3895748 (1975-07-01), Klingenberg
patent: 3937400 (1976-02-01), Krause
patent: 4037598 (1977-07-01), Georgi
patent: 4137913 (1979-02-01), Georgi
patent: 4523901 (1985-06-01), Schippers et al.
patent: 4597719 (1986-07-01), Tano
patent: 4690621 (1987-09-01), Swain
patent: 4740139 (1988-04-01), Mantell
patent: 5006067 (1991-04-01), Pignattini

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