Conveyors: fluid current – Intake to fluid current conveyor – Load receptacle type
Reexamination Certificate
1998-07-07
2001-06-26
Ellis, Christopher P. (Department: 3615)
Conveyors: fluid current
Intake to fluid current conveyor
Load receptacle type
C406S046000, C406S144000, C406S153000
Reexamination Certificate
active
06250852
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates to spherical object supplying apparatus, and more particularly to a spherical object supplying apparatus which is used for supplying spherical objects from a process to the following process in a process of treating or manufacturing spherical objects such as spherical single crystal silicon.
2. Description of the Related Art
Heretofore, a semiconductor device is formed according to the following method: That is, a circuit pattern is formed on a plate-shaped single crystal silicon wafer, and the wafer thus processed is subjected to dicing as required, to form a semiconductor chip. In this connection, recently a technique has been proposed in the art that a circuit pattern is formed on a spherical semiconductor (or ball semiconductor) less than 1 mm in diameter.
The formation of discrete elements such as solar batteries and photo-sensors or semiconductor integrated circuits, for instance, with spherical single crystal silicons, needs a variety of treatment processes such as a process of mirror-polishing spherical single crystal silicons, a washing process, a film forming process, a resist coating process, a photo-lithography process, and an etching process. And in order to manufacture the spherical semiconductor elements with high efficiency, it is necessary to provide a manufacturing line system including the aforementioned variety of processes.
If, with respect to the manufacturing line system, spherical single crystal silicons are irregularly delivered to a processing station (hereinafter referred to as “ a second station”, when applicable) from the preceding processing station (hereinafter referred to as “ a first station”, when applicable), then at the second station the amount of spherical single crystal silicons supplied thereto is variable, and therefore the processing conditions must be adjusted according to the variable amount of spherical single crystal silicons. Hence, in this case, it is impossible to achieve the processes with high efficiency. Hence, it is essential that spherical objects such as spherical single crystal silicons are sequentially and periodically conveyed to a processing station from the preceding processing station at predetermined intervals. The surfaces of a silicon is liable to be oxidized. If the surface of the silicon is covered with a natural oxide film, the silicon is not sufficiently in contact with a metal electrode layer formed on the natural oxide film. That is, it is preferable that the spherical objects are conveyed and treated in a closed space without contacting the outside air.
As above described, in order to manufacture spherical semiconductor elements with high efficiency, it is necessary to connect the various processing stations one after another; that is, to provide the processing stations in a line, and to sequentially supply the aforementioned spherical single crystal silicons to all of the processing stations. And, in view of productivity and quality, the aforementioned operations must be carried out at high speed and with high reliability.
In the case where spherical objects stored in a storing container like a hopper is dropped one at a time through the pipe of the container so as to be supplied to a processing station, as shown in
FIG. 1
the spherical objects S are gathered (stacked) at the outlet E as in the case of blocks stacked to form a block wall, thus closing the outlet E.
SUMMARY OF THE INVENTION
In view of the foregoing, an object of the invention is to provide a spherical object supplying apparatus which, in supplying spherical objects such as spherical single crystal silicons from a storing container such as a hopper to a processing or manufacturing station, positively and smoothly supplies the spherical objects thereto one at a time.
Another object of the invention is to provide a spherical object supplying apparatus which is simple in construction, and periodically and quickly supplies spherical objects such as spherical single crystal silicons at predetermined intervals.
A further object of the invention is to provide a spherical object supplying apparatus which quickly supplies spherical objects such as spherical single crystal silicons in a non-contact mode without damaging the surfaces of the spherical objects.
A First aspect of the apparatus is a spherical object supplying apparatus of the present invention, which comprises:
a supplying pipe-path coupled to a spherical object storing container;
a branch pipe path which branches from the supplying pipe path; and
a fluid supplying apparatus adapted to introduce a pressurized fluid into the branch pipe path,
spherical objects being conveyed by the pressurized fluid which is jetted through the branch pipe path into the supplying pipe path.
A second aspect of the apparatus is an apparatus according to the first aspect, wherein the branching angle of the branch pipe path with respect to the supplying pipe path is 45° or less.
A third aspect of the apparatus is an apparatus according to the first aspect, wherein the fluid supplying apparatus has a pressurized fluid introducing pipe whose open end is located in the storing container, to jet pressurized fluid into the storing container.
A fourth aspect of the apparatus is an apparatus according to the first aspect, wherein a part of the supplying pipe path which is located downstream of the branching point of the branch pipe path as viewed in the direction of conveyance of spherical objects is bent and extended along the prolongation of the branch pipe path.
A fifth aspect of the apparatus is an apparatus according to the first aspect, wherein the supplying pipe path is made up of a plurality of small supplying pipe paths which are connected in series to one another, and arranged in such a manner that diameters thereof are gradually smaller in the direction of conveyance of spherical objects.
A sixth aspect of the apparatus is an apparatus according to the fifth aspect, wherein the small supplying pipe paths have branch pipe paths, respectively.
A seventh aspect of the apparatus is an apparatus according to the first aspect, wherein the spherical objects are spherical silicons.
An eighth aspect of the apparatus is an apparatus according to the seventh aspect, wherein the pressurized fluid is an inert gas.
A first specific aspect of the invention resides in that, when spherical objects are supplied through the supplying pipe path thus as a pipe, the pressurized fluid is introduced into the supplying pipe path to accelerate the spherical objects thereby to quickly and positively the spherical objects to the following processing apparatus (or station).
That is, the spherical objects are supplied the following processing apparatus (or station) while being accelerated by the pressurized fluid jetted at high speed. This fact eliminates the difficulty that the spherical object supplying rate is lower than the spherical object processing rate. And, by adjusting the flow rate and pressure of the pressurized fluid, the spherical object supplying speed can be freely controlled.
A second specific aspect of the invention resides in that the angle of introduction of the pressurized fluid which is introduced into the supplying pipe path is set to 45° or less. The limitation of the branch angle &thgr; to 45° or less prevents the pressurized fluid from flowing backwardly, upwardly as viewed in the direction of conveyance of spherical objects. Hence, in addition to the above-described effect, the invention has an effect that the spherical objects are stably conveyed.
A third specific aspect of the invention resides in that the open end of the pressurized fluid introducing pipe is located in the storing container to jet pressurized fluid into the storing container thereby to agitate the spherical objects in the storing container.
The agitation of the spherical objects in the storing container with the pressurized fluid prevents the outlet of the storing container with the spherical objects. Hence, in addition to the above-described effects, the inventi
Dillon, Jr. Joe
Ellis Christopher P.
Greenblum & Bernstein P.L.C.
Mitsui High-Tec, Inc.
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