Spherical electrode type charged particle analyzer

Details Spherical electrode type charged particle analyzer Spherical electrode type charged particle analyzer

1990-07-06

1992-04-21

Anderson, Bruce C.

Compositions

Liquid crystal compositions

250309, 250310, H01J 4300

Patent

active

051071118

ABSTRACT:
A charged particle analyzer comprises a spherical grid, a spherical electrode concentric with each other, an emission portion for emitting charged particles, a screen plate having an exit opening, a plurality of second spherical grids forming a high pass filter for the charged particles, a detector for detecting the charged particles, and an obstacle ring being in parallel with an equatorial plane normal to a line connecting the emission portion and the center of the exit opening and being within the spherical electrode.

REFERENCES:
patent: 3679896 (1972-07-01), Wardly
patent: 4179604 (1979-12-01), Christou
patent: 4849629 (1989-07-01), Daimon et al.

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