Spherical article conveying atmosphere replacing device

Details Spherical article conveying atmosphere replacing device Spherical article conveying atmosphere replacing device

1998-06-11

2000-02-08

Beck, Shrive

Coating apparatus

Gas or vapor deposition

Multizone chamber

136250, 118724, 118725, 118715, C23C 1600, H01L 2500

Patent

active

060224150

ABSTRACT:
A spherical article conveying atmosphere replacing device includes a recovering chamber which a recovering pipe penetrates; a pressure reducing device (or recovering pump) for making the inside of the recovering chamber negative in pressure; a sending chamber which a sending pipe penetrates which is coupled to the recovering pipe; and a pressurizing device (or sending pump) for making the inside of the sending chamber positive in pressure, so that the atmosphere for the spherical single crystal silicon conveyed in the recovering pipe is recovered in the recovering chamber with high efficiency which is negative in pressure, and in the sending chamber the spherical single crystal silicon in the sending pipe are accelerated.

REFERENCES:
patent: 4226208 (1980-10-01), Nishida et al.
patent: 4430150 (1984-02-01), Levine et al.
patent: 5112185 (1992-05-01), Koike
patent: 5278097 (1994-01-01), Hotchkiss et al.
patent: 5738771 (1998-04-01), Yoshida

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