Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2004-11-09
2010-02-02
Souw, Bernard E (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S305000, C250S311000, C250S400000, C850S009000, C850S063000, C378S043000, C378S063000, C378S161000
Reexamination Certificate
active
07655923
ABSTRACT:
A mesh (M) having an ellipsoid shape or a shape close to the ellipsoid shape is attached to an electrode (EL1) among electrodes (EL1to ELn). Voltages of the later-stage electrodes (EL2to ELn) are appropriately set. With this arrangement, a local negative spherical aberration generated by the mesh (M) is cancelled out with a positive spherical aberration. This optimizes an electric field distribution. As a result, this realizes an electrostatic lens whose acceptance angle is extended to about ±60°.
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Daimon Hiroshi
Kato Makoto
Kudo Masato
Matsuda Hiroyuki
Harness & Dickey & Pierce P.L.C.
Jeol Ltd.
National University Corporation Nara Institute of Science and Te
Sahu Meenakshi S
Souw Bernard E
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