Spectrum measuring apparatus and method

Details Spectrum measuring apparatus and method Spectrum measuring apparatus and method

2006-11-28

2006-11-28

Porta, David (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

C250S50400H, C250S365000, C378S158000, C356S420000

Reexamination Certificate

active

07141798

ABSTRACT:
A spectrum measuring apparatus that includes an extinction member for decreasing a light intensity from an EUV light source, a spectrum member for extracting light with a desired wavelength band from the decreased intensity light and a detector for detecting a light intensity of the light with a desired wavelength band is disclosed. Then, a spectrum intensity distribution (spectrum) is obtained by (a) a plural opening is located in the extinction member, and the light from the EUV light source passes through the plural opening at the same time, or (b) the detector detects the light volume of the light with a desired wavelength band as thermal energy.

REFERENCES:
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patent: 6636367 (2003-10-01), Drodofsky et al.
patent: 6657216 (2003-12-01), Poris
patent: 6825481 (2004-11-01), Miyake
patent: 6894285 (2005-05-01), Kleinschmidt et al.
patent: 2002/0085286 (2002-07-01), Drodofsky et al.
patent: 2003/0058429 (2003-03-01), Schriver
patent: 2003/0155531 (2003-08-01), Clark et al.
patent: A 2002-175980 (2002-06-01), None

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