Spectroscopy probe and material processing system

Details Spectroscopy probe and material processing system Spectroscopy probe and material processing system

2011-04-19

2011-04-19

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

For light transmission or absorption

Of fluent material

C366S142000, C356S300000

Reexamination Certificate

active

07929140

ABSTRACT:
A process monitoring system determines a spectral response of a process material. This system has a tunable laser for generating an optical signal that is wavelength tuned over a scan band and an optical probe for conveying the optical signal to the process material and detecting the spectral response of the process material. The optical probe expands a beam of the optical signal to a diameter of greater than 10 millimeters. This avoids one of the difficulties with monitoring these process applications by ensuring that the spectroscopy measurements are accurate and repeatable. It is desirable to sample a relatively large area of the processed material since it can be heterogeneous. Additionally the large area mitigates spectral noise such as from speckle.

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