Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1993-07-26
1995-04-11
Turner, Samuel A.
Optics: measuring and testing
By particle light scattering
With photocell detection
356345, 356359, G01B 902
Patent
active
054063779
ABSTRACT:
A pulsed electromagnetic radiation (EMR) source and an interferometer are used to obtain spectra from the surface of a sample. The pulsed EMR source uses a broadband radiation source and a monochromator to generate monochromatic radiation. Alternatively, a tunable laser can be used as the monochromatic radiation source. The modulated radiation impinges on the surface of interest where it is absorbed. The absorption of radiation causes the surface of the sample to expand. This change in dimension is then detected by an interferometer which employs a monochromatic radiation source to measure the instantaneous distance between the sample surface and the interferometer. The detection system of the interferometer can be an imaging device such as a video camera to obtain the spatial distribution of chemical composition of the sample surface.
REFERENCES:
patent: 5042949 (1991-08-01), Greenberg et al.
U.S. Patent Application "Scanning Spectral Analysis Micro-probe Subsystem" by Charles L. Dumoulin, Serial No. 07/546,281 filed Jun. 29, 1990
"Optical Interferometry", by Glen M. Robinson, et al, Scientific American, Jul. 1991, pp. 445-449.
General Electric Company
Keesee, II LaCharles P.
Snyder Marvin
Turner Samuel A.
Zale Lawrence P.
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