Spectroscopic ellipsometers

Details Spectroscopic ellipsometers Spectroscopic ellipsometers

2011-08-16

2011-08-16

Toatley, Gregory J (Department: 2877)

Optics: measuring and testing

Shape or surface configuration

C356S237100, C356S239500, C356S367000

Reexamination Certificate

active

07999949

ABSTRACT:
The present invention discloses an optical measurement and/or inspection device that, in one application, may be used for inspection of semiconductor devices. A method is disclosed for extracting information of a device-under-test for an ellipsometer, comprising the steps: providing a plurality of incoming polarized beams using a plurality of polarizers, where each of the beams being polarized at a designated polarizing angle; using a parabolic reflector to focus said plurality of incoming polarized beams on a spot on a DUT; using a parabolic reflector to collect a plurality of beams reflected from said DUT; and analyzing said collected beams using a plurality of analyzers, wherein each of the analyzers having a designated polarizing angle with respect to its respective polarizer.

REFERENCES:
patent: 6169601 (2001-01-01), Eremin et al.
patent: 6987568 (2006-01-01), Dana
patent: 7119897 (2006-10-01), Vaez-Iravani et al.
patent: 7139083 (2006-11-01), Fielden et al.

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