Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1995-01-11
1996-07-16
Allen, Stephone
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
25055922, 356432, G01J 350
Patent
active
055369367
ABSTRACT:
This invention concerns a spectroscopic ellipsometer modulated at a frequency (.omega..sub.m) intended for taking measurements of a sample (3). The spectroscopic ellipsometer is phase modulated, the sample being excited by external means (16) producing periodic, alternating excitation at a frequency (.OMEGA..sub.e). The measurement contains the ellipsometric parameter values (.psi., .DELTA.) of the sample, respectively in the presence of (.psi..sub.1, .DELTA..sub.1) and in the absence of (.psi..sub.2, .DELTA..sub.2) excitation of the sample, as a function of excitation frequency (.OMEGA..sub.e).
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patent: 5329357 (1994-07-01), Bernoux et al.
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"Electroreflectance in a Nonuniform Field in the Small Wave-Number Approximation and its Measurement by Ellipsometry," by Yang et al., Physical Review, vol. 5, No. 6, Mar. 15, 1972, pp. 2242-2250.
"Ellipsometric Measurement of the Kerr Magnetooptic Effect," by Minden, Applied Optics, vol. 18, No. 6, Mar. 15, 1979, pp. 813-817.
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Drevillon Bernard
Ossikovski Razvigor
Parey Jean-Yves
Allen Stephone
Centre National de la Recherche
Le Que T.
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