Spectroscopic ellipsometer and polarimeter systems

Details Spectroscopic ellipsometer and polarimeter systems Spectroscopic ellipsometer and polarimeter systems

2007-08-05

2009-11-10

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

Spectroscopy

C356S369000

Reexamination Certificate

active

07616319

ABSTRACT:
A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

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