Spectroscope and measuring apparatus using the same

Details Spectroscope and measuring apparatus using the same Spectroscope and measuring apparatus using the same

2007-01-23

2007-01-23

Luebke, Renee (Department: 2875)

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

C356S328000, C356S329000

Reexamination Certificate

active

11042447

ABSTRACT:
Disclosed is a spectroscope and a measuring apparatus using the same. The spectroscope according to an aspect of the present invention includes a light source, a spectroscopic member for dispersing light from the light source in accordance with wavelength, a slit member arranged so that a portion of the dispersed light from the spectroscopic member can pass therethrough and a remaining portion of the light is blocked thereby, and a sensor having a spatial resolution capable of discriminating the wavelength of light passing through the slit member on the basis of a spectral distribution being projected in a spectral direction of light by the spectroscopic member. With this arrangement, the wavelength of light passing through the slit member can be discriminate real time.

REFERENCES:
patent: 4804266 (1989-02-01), Barshad
patent: 5880833 (1999-03-01), Iwasaki
patent: 6795180 (2004-09-01), Bungo
J. H. Underwood et al.; “Beamline for Measurement and Characterization of Multilayer Optics for EUV Lithography”;Proceedings of SPIE; vol. 3331; pp. 52-61; (1998).

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