Spectrophotometer

Details Spectrophotometer Spectrophotometer

1996-05-21

1997-01-07

McGraw, Vincent P.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356328, G01J 336

Patent

active

055922910

ABSTRACT:
In a spectrophotometer according to the present invention, electric signal from a photo-detector is converted into digital data by an A/D convertor and stored in a memory. In the process of correcting data, a signal processing unit first reads out from the memory data of a wavelength of a plurality of points consisting of a target point to be corrected and other points in a predetermined proximity of the target point in the two-dimensional area on the sample surface. Then the signal processing unit corrects the data of the target point using the data of the other proximal points. In correcting data, a set of two weights a.sub.i and b.sub.j are assigned to every one of the points, where the values of the weights a.sub.i change according to the position of the points in the X direction and the values of the weights b.sub.j change according to the position of the points in the Y direction. By predetermining the values of the weights a.sub.i and b.sub.j properly, the difference in the resolving power between the X direction and the Y direction is cancelled.

REFERENCES:
patent: 4544271 (1985-10-01), Yamamoto

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