Radiant energy – Electron energy analysis
Patent
1998-08-25
2000-08-15
Nguyen, Kiet T.
Radiant energy
Electron energy analysis
250396R, H01J 4700
Patent
active
061040290
ABSTRACT:
A spectrometer and method of spectroscopy are provided for surface analysis. The spectrometer comprises an energy analyser for analysing the energies of charged particles liberated from a sample, a lens arranged to project a diffraction image of the analysis area at the image plane of the lens and a detector for detecting the charged particles. The analyser and lens are arranged to generate an image at the detector in which the charged particles are distributed along a first direction according to their emission angles and are distributed along another direction according to their energies. The detector is arranged to detect the distribution of charged particles in the image along the first direction to provide angle resolved energy spectra.
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Barnard Bryan
Coxon Peter
Von Harrach H. Sebastian
Nguyen Kiet T.
VG Systems Ltd.
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