Spectral purity filters and methods therefor

Details Spectral purity filters and methods therefor Spectral purity filters and methods therefor

2008-09-12

2010-06-22

Souw, Bernard E (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S365000, C250S372000, C250S482100, C355S071000, C359S361000

Reexamination Certificate

active

07741626

ABSTRACT:
A spectral purity filter arrangement is disclosed. The spectral purity filter arrangement includes a film configured for filtering out at least a portion of input light and a support structure coupled to the film along at least one edge of the film. The spectral purity filter arrangement further includes a gas control subsystem configured to direct a gas at the film to support the film at least when the film is disposed in an operational position to perform the filtering.

REFERENCES:
patent: 5414489 (1995-05-01), Kaplan
patent: 7088431 (2006-08-01), Ottens et al.
patent: 7211810 (2007-05-01), Bakker et al.
patent: 7248670 (2007-07-01), Hoghoj et al.
patent: 2005/0117239 (2005-06-01), Hoghoj et al.
patent: 2005/0134828 (2005-06-01), Ottens et al.
patent: 2006/0138354 (2006-06-01), Bakker et al.

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