Optics: measuring and testing – For optical fiber or waveguide inspection
Patent
1990-08-24
1992-05-12
McGraw, Vincent P.
Optics: measuring and testing
For optical fiber or waveguide inspection
356328, G01J 318, G01J 336
Patent
active
051121255
DESCRIPTION:
BRIEF SUMMARY
BACKGROUND OF THE INVENTION
The invention relates to a spectral microscope with a photometer.
Microscopes with a photometer and a monochromator (microspectrophotometer) serve to determine the spectral distribution of radiation. The object to be examined is here illuminated by a light source and the radiation altered by the object is measured. A microspectrophotometer of this type is known from German Offenlegungsschrift 2,542,731. This publication describes a microscope with separate retrofittable auxiliary devices which can be optionally attached to the microscope. One of these auxiliary devices has a grating monochromator with an entrance slit, a concave mirror and also an optical grating. The photometer is arranged in an auxiliary device and is connected to the monochromator via a further retrofittable attachment. By exchanging a plane mirror for the grating, this microscope can be used both as a spectrophotometer and as a pure photometer. The device described here is very expensive due to the high outlay for adjustment between the retrofittable constructional units and functional units. Moreover, with a device of this type it is not possible to measure a preselectable object point both densitometrically and spectrophotometrically at the same time.
A measuring microscope which has an attachable constructional unit for densitometric and spectrophotometric measurement of the light coming from the object is known from German Offenlegungsschrift 3,432,252. For this, an optical slit is provided in the constructional unit in an intermediate image plane of the object. Following this is a partially transmitting mirror for producing two separate beams. One of these beams contains a photometer with photomultiplier, while the concave reflection grating and also a diode array for spectrophotometric measurement are arranged in the other beam. Besides the expensive construction, with this measuring microscope it is only possible to measure in the optical axis, so that the measuring surface of the object can only occur by a displacement of the object with a scanning stage. In addition, it is not possible here to make the slit image and the associated spectral lines visible in the eyepiece.
SUMMARY OF THE INVENTION
It is therefore the object of the present invention to equip a conventional microscope for a densitometric and spectrophotometric object measurement with simple means and thereby also permit both measurements simultaneously.
This object is achieved by the invention by the characterizing features of claim 1. Further advantageous refinements form the subject-matter of the subclaims.
With this device it is possible, in particular by using a surface sensor, to record the zero-order and first-order diffraction images simultaneously. A spectrum and a photometrically determined luminous quantity can be assigned to each object point as a function of the entrance slit of the monochromator. In this way, for example the width of structures of an object are determined with the photometer and at the same time the height of the respective object structure is determined from the spectrum. Each object point can thus simultaneously contain two measurable pieces of information (area and height).
If a scanning stage is used on the microscope, in addition it is possible to carry out time-resolved spectral measurements and time-resolved densitometric measurements. It is thus even possible, for example, to determine automatically luminescence decay times of a particle that has been excited.
Owing to the extremely simple construction, already available microscopes can be retrofitted, it being possible to use such a measuring microscope for conventional observations again without laborious conversion.
BRIEF DESCRIPTION OF THE DRAWINGS
The invention is described in greater detail below with reference to diagrammatically illustrated exemplary embodiments. In the figures:
FIG. 1 : shows the beams of a microscope,
FIG. 2a: shows an optical wedge with optical transmission grating arranged thereon,
FIG. 2b: shows an optical wedge
REFERENCES:
patent: 3572933 (1971-03-01), Boostrom
patent: 4181436 (1980-01-01), Wasmund et al.
patent: 4351611 (1982-09-01), Leif
patent: 4650321 (1987-03-01), Thompson
patent: 4674883 (1987-06-01), Baurschmidt
patent: 4678325 (1987-07-01), Lehtikoski et al.
patent: 4818110 (1989-04-01), Davidson
patent: 4844617 (1989-07-01), Kelderman et al.
McGraw Vincent P.
Wild Leitz GmbH
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