Optics: measuring and testing – By light interference – Spectroscopy
Reexamination Certificate
2008-01-08
2008-01-08
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
Spectroscopy
C356S519000
Reexamination Certificate
active
11169202
ABSTRACT:
A bandwidth meter apparatus and method for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth or the light emitted from the laser and a second output representative of a second parameter which is indicative or the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivariable equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter; the multivariable equation comprising a symmetry sensitive term.
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Cray William
Cymer Inc.
Turner Samuel A.
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