Speckle reduction method and system for EUV interferometry

Details Speckle reduction method and system for EUV interferometry Speckle reduction method and system for EUV interferometry

2006-04-11

2006-04-11

Toatley, Gregory (Department: 2877)

Optics: measuring and testing

By light interference

Having wavefront division

C356S512000

Reexamination Certificate

active

07027164

ABSTRACT:
A wavefront measurement system has a source of electromagnetic radiation. An imaging system focuses the electromagnetic radiation at an object plane. A first grating is positioned in the object plane and has a plurality of rulings with randomized height. A stage moves the first grating parallel to the rulings. A projection optical system projects an image of the first grating onto an image plane. A second grating is at the image plane. A detector behind the second grating receives a fringe pattern produced by the second grating.

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