Speckle reduction method and apparatus

Details Speckle reduction method and apparatus Speckle reduction method and apparatus

2007-03-09

2010-11-23

Epps, Georgia Y (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C250S201400, C359S368000, C356S237200

Reexamination Certificate

active

07838816

ABSTRACT:
An apparatus adapted for con focal imaging of a non-flat specimen comprising a coherent light source for producing a light beam, imaging optics adapted to focus the light beam into at least one spot on a surface of a specimen, and a detector adapted to receive and detect light reflected from the specimen surface. The imaging optics comprise at last one optical component located so that the light reflected from the specimen surface passes therethrough on its way to the detector. The optical component is movable so as to move the at least one spot, within a range of movement, to a number of distinct locations in a plane perpendicular to the apparatus' optical axis, within the detector's integration time.

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