Speckle interferometry spatial filters or the like to achieve us

Details Speckle interferometry spatial filters or the like to achieve us Speckle interferometry spatial filters or the like to achieve us

1992-09-29

1995-02-21

Turner, Samuel A.

Optics: measuring and testing

By polarized light examination

With birefringent element

356351, G01B 902

Patent

active

053921216

ABSTRACT:
It is an object of the present invention to provide a speckle interference apparatus capable of selecting given phase information at a speed higher than speckle interference fringe patterns with a higher precision. For a speckle interference apparatus in which a light beam from a light source is divided into plural light beams, and one of the light beams is passed through a measuring surface and the other light beam through a reference surface to be superposed respectively for the formation of speckle interference fringe patterns, there are arranged in the optical paths spatial filters having windows for sampling the area of a given phase among the speckle interference fringe patterns. Hence, with such filters, speckle interference fringe patterns of the same phase are produced.

REFERENCES:
patent: 4913547 (1990-04-01), Moran
patent: 5127731 (1992-07-01), De Groot

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