Speckle interferometer apparatus

Details Speckle interferometer apparatus Speckle interferometer apparatus

2006-08-15

2006-08-15

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07092104

ABSTRACT:
In a speckle interferometer apparatus2, an optical member mounting device10mounted with optical members including a pair of luminous flux outputting devices9a,9b,9c,9dis disposed on the object side of a main unit of an imaging device3while being separated from the imaging device3. A light-transmitting area14is formed between the pair of luminous flux outputting devices9a,9b,9c,9dso as to transmit therethrough interference light from an object surface.

REFERENCES:
patent: 5231468 (1993-07-01), Deason et al.
patent: 6097477 (2000-08-01), Sarrafzadeh-Khoee
patent: 6188482 (2001-02-01), Cloud
patent: 6417916 (2002-07-01), Dengler et al.
patent: 2001-311613 (2001-11-01), None

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