Specimen topography reconstruction

Image analysis – Applications – Manufacturing or product inspection

Reexamination Certificate

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Details

C382S190000, C382S275000, C702S081000, C702S094000, C702S191000

Reexamination Certificate

active

07136519

ABSTRACT:
This method removes high frequency noise from shape data, significantly improves metrology system (10) performance and provides very compact representation of the shape. This model-based method for wafer shape reconstruction from data measured by a dimensional metrology system (10) is best accomplished using the set of Zernike polynomials (matrix L). The method is based on decomposition of the wafer shape over the complete set of the spatial function. A weighted least squares fit is used to provide the best linear estimates of the decomposition coefficients (Bnk). The method is operable with data that is not taken at regular data points and generates a reduced data field of Zernike coefficients compared to the large size of the original data field.

REFERENCES:
patent: 5091963 (1992-02-01), Litt et al.
patent: 5124927 (1992-06-01), Hopewell et al.
patent: 5497007 (1996-03-01), Uritsky et al.
patent: 5511005 (1996-04-01), Abbe et al.
patent: 5642298 (1997-06-01), Mallory et al.
patent: 5739906 (1998-04-01), Evans et al.
patent: 5750908 (1998-05-01), Drohan
patent: 5966243 (1999-10-01), Braunecker et al.
patent: 5978085 (1999-11-01), Smith et al.
patent: 5986760 (1999-11-01), Nakayama et al.
patent: 6086204 (2000-07-01), Magnante
patent: 6094268 (2000-07-01), Oshida et al.
patent: 6199986 (2001-03-01), Williams et al.
patent: 6341183 (2002-01-01), Goldberg
patent: 6547395 (2003-04-01), Neal et al.

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