Specimen stage

Details Specimen stage Specimen stage

2011-03-08

2011-03-08

Wilson, Lee D (Department: 3727)

Work holders

Holder mounted for movement

Including means to shift holder position

C269S060000, C269S2890MR, C269S063000

Reexamination Certificate

active

07900896

ABSTRACT:
An object of the present invention is to provide a specimen stage which is simple in structure, and which suppresses a positional shift due to a friction heat caused by a brake or the like. One aspect to achieve the object provides a specimen stage including: a thrust portion thrust by a thrusting member; and a slide surface thrust by the thrust portion. When the specimen stage stops, the specimen stage performs a control in a way that a part of the slide surface in contact with the thrust portion, and/or a portion adjacent to the part or the thrust portion is heated. By heating the part of the slide surface or the like in this manner, a temperature gradient can be suppressed as described above (see FIG.3).

REFERENCES:
patent: 3578233 (1971-05-01), Meister et al.
patent: 4013280 (1977-03-01), Chitayat et al.
patent: 4706796 (1987-11-01), Chambers
patent: 2009/0014932 (2009-01-01), Nikaido et al.
patent: 2009/0218510 (2009-09-01), Fujita
patent: 2006-237069 (2006-09-01), None
patent: 2007-019279 (2007-01-01), None
patent: 2007-042514 (2007-02-01), None

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