Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2005-01-04
2005-01-04
Lee, John R. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S311000, C250S307000
Reexamination Certificate
active
06838675
ABSTRACT:
To prevent the displacement from an optical axis of a charged particle beam from being made independent of the direction (parallel to or perpendicular to the optical axis) of a magnetic field applied to a specimen, a system including an electron microscope and using a charged particle beam optical system is provided with a source of a charged particle beam, a condenser optical system, a specimen to be observed, a system for applying a magnetic field to the specimen, an imaging optical system and an image observation/recording apparatus, is provided with first and second charged particle beam deflection systems in order along a direction in which the charged particle beam travels between the condenser optical system and the specimen, is provided with third and fourth charged particle beam deflection systems in order between the specimen and the imaging lens system, and the quantity and the direction of the deflection of the charged particle beam by each deflection system and the intensity and the bearing of a magnetic field applied to the specimen are related according to predetermined relation.
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Endo Junji
Harada Ken
Osakabe Nobuyuki
A. Marquez, Esq. Juan Carlos
Fisher Esq. Stanley P.
Hitachi , Ltd.
Japan Science and Technology Agency
Lee John R.
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