Specimen observation method in atomic force microscopy and...

Measuring and testing – Surface and cutting edge testing – Roughness

Reexamination Certificate

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Reexamination Certificate

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06983644

ABSTRACT:
A method and apparatus for observing a specimen in atomic force microscopy with a vibrating cantilever maintained in resonance while a probe attached to the cantilever is maintained in contact with the specimen. The Q factor of the cantilever is determined based upon the detected amplitude.

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