Radiant energy – Ionic separation or analysis – Static field-type ion path-bending selecting means
Patent
1981-02-13
1982-09-14
Henry, Jon W.
Radiant energy
Ionic separation or analysis
Static field-type ion path-bending selecting means
350 87, 250310, G02B 2100
Patent
active
043492428
ABSTRACT:
A specimen observation apparatus for obtaining both an optical microscope image and a scanning electron microscope image simultaneously from one specimen. The apparatus includes a transparent glass plate having a transparent electrically conductive layer on a surface thereof for supporting the specimen in a vacuum column. The glass plate seals off one end of the vacuum column. The specimen position is illuminated with light and an electron beam along the same optical axis in the vacuum column to create both an optical microscope image with the light passing through the specimen and a scanning electron microscope image based on information obtained by scanning the electron beam over the specimen. The glass plate, while sealing one end of the vacuum column, is movably disposed about the optical axis. An optical microscope is located outside the vacuum column near to the glass plate.
REFERENCES:
patent: 3150255 (1964-09-01), Wilska
patent: 3169183 (1965-02-01), Radtke et al.
patent: 3371185 (1968-02-01), Anderson
patent: 3378670 (1968-04-01), Smith et al.
patent: 3761709 (1973-09-01), Hasegawa et al.
Henry Jon W.
Nihon Denshi Kabushiki Kaisha
LandOfFree
Specimen observation apparatus including an optical microscope a does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Specimen observation apparatus including an optical microscope a, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Specimen observation apparatus including an optical microscope a will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2152523