Specimen holder for a particle beam optical apparatus

Details Specimen holder for a particle beam optical apparatus Specimen holder for a particle beam optical apparatus

1993-08-23

1995-05-02

Ben, Loha

Optical: systems and elements

Compound lens system

Microscope

359391, 25044211, G02B 2126, G21K 510

Patent

active

054125030

ABSTRACT:
A specimen holder for use in a particle beam optical apparatus, for example an electron microscope. The motions of the specimen in orthogonal Z and Y directions are realized in known manner by motions of a tubular housing in a ball joint. In order to achieve a defined and reproducible motion of the specimen in the x-direction, a rod-shaped specimen support is supported in V-grooves in the housing. The specimen support is connected to a cylindrical flange member which is coupled to the housing via a bellows, providing a vacuum passage which is static for the x-motion. Static vacuum sealing is provided by an O-ring.

REFERENCES:
patent: 2602899 (1952-07-01), Page
patent: 4101778 (1978-07-01), Von Rauch et al.
patent: 4587431 (1986-05-01), Demura
patent: 4771178 (1988-09-01), Egle et al.

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