Specimen coordinate automated measuring machine/fiducial automat

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33555, 33548, 33783, G01B 503

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050501127

ABSTRACT:
The Specimen coordinate Automated Measuring Machine (SCAMM) and the Fiducial Automated Measuring Machine (FAMM) is a computer controlled metrology system capable of measuring length, width, and thickness, and of locating fiducial marks. SCAMM and FAMM have many similarities in their designs, and they can be converted from one to the other without taking them out of the hot cell. Both have means for: supporting a plurality of samples and a standard; controlling the movement of the samples in the +/- X and Y directions; determining the coordinates of the sample; compensating for temperature effects; and verifying the accuracy of the measurements and repeating as necessary. SCAMM and FAMM are designed to be used in hot cells.

REFERENCES:
patent: 3102344 (1963-09-01), Herman
patent: 3226833 (1966-01-01), Lemelson
patent: 3670421 (1972-06-01), Kiewicz et al.
patent: 4305207 (1981-12-01), Lantz
patent: 4665625 (1987-05-01), Ireland et al.
patent: 4680865 (1987-07-01), Danielli et al.
patent: 4908951 (1990-03-01), Gurny
"Core Tester Contact Assembly" IBM Technical Disclosure Bulletin, vol. 9; No. 3, Aug. 1966; pp. 296-297.

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