Specimen-cooling system for electron microscope or the like

Refrigeration – Storage of solidified or liquified gas – Including cryostat

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2504431, H01J 3720, F25B 1900

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active

057351295

ABSTRACT:
A cooling system for an electron microscope specimen comprises a refrigerant container, a passage for introducing the refrigerant into a heat-exchanging position, a flow rate-adjusting valve mounted in an exhaust passage and a control unit. The flow rate of gas produced by evaporation is adjusted by a rate-adjusting valve. The control unit establishes either a maximum flow rate mode for rapid cooling or a minimum flow rate mode for observation of an image.

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